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{"id":3845,"date":"2025-02-13T16:38:08","date_gmt":"2025-02-13T08:38:08","guid":{"rendered":"http:\/\/www.czhuaqiang.com\/archives\/3845"},"modified":"2025-02-13T16:38:08","modified_gmt":"2025-02-13T08:38:08","slug":"%e7%94%b5%e5%ad%90%e6%b8%85%e6%b4%97%e6%b6%b2%e8%bf%87%e6%bb%a4%e6%b6%b2%e4%bd%93%e8%bf%87%e6%bb%a4%e8%a2%8b%e7%9a%84%e4%bd%8e%e7%a6%bb%e5%ad%90%e6%ba%b6%e5%87%ba%e8%bf%87%e6%bb%a4%e6%8a%80%e6%9c%af","status":"publish","type":"post","link":"http:\/\/www.czhuaqiang.com\/archives\/3845","title":{"rendered":"\u7535\u5b50\u6e05\u6d17\u6db2\u8fc7\u6ee4\u6db2\u4f53\u8fc7\u6ee4\u888b\u7684\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u5e94\u7528"},"content":{"rendered":"

\u7535\u5b50\u6e05\u6d17\u6db2\u8fc7\u6ee4\u6db2\u4f53\u8fc7\u6ee4\u888b\u7684\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u5e94\u7528<\/h3>\n

\u6458\u8981<\/h4>\n
\u672c\u6587\u4e3b\u8981\u63a2\u8ba8\u4e86\u7535\u5b50\u6e05\u6d17\u6db2\u8fc7\u6ee4\u6db2\u4f53\u8fc7\u6ee4\u888b\u5728\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u4e2d\u7684\u5e94\u7528\u3002\u901a\u8fc7\u5bf9\u56fd\u5185\u5916\u76f8\u5173\u6587\u732e\u7684\u7efc\u8ff0\uff0c\u7ed3\u5408\u5177\u4f53\u7684\u4ea7\u54c1\u53c2\u6570\u548c\u6027\u80fd\u6d4b\u8bd5\u7ed3\u679c\uff0c\u8be6\u7ec6\u4ecb\u7ecd\u4e86\u8be5\u6280\u672f\u7684\u5e94\u7528\u80cc\u666f\u3001\u539f\u7406\u3001\u4f18\u52bf\u4ee5\u53ca\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u3002\u6587\u7ae0\u8fd8\u5f15\u7528\u4e86\u591a\u7bc7\u56fd\u5916\u8457\u540d\u6587\u732e\uff0c\u4ee5\u589e\u5f3a\u8bba\u8ff0\u7684\u79d1\u5b66\u6027\u548c\u6743\u5a01\u6027\u3002\u540e\uff0c\u901a\u8fc7\u8868\u683c\u7684\u5f62\u5f0f\u6574\u7406\u4e86\u4e3b\u8981\u4ea7\u54c1\u7684\u53c2\u6570\uff0c\u5e76\u5bf9\u53c2\u8003\u6587\u732e\u8fdb\u884c\u4e86\u6807\u6ce8\u3002<\/p>\n
\n

1. \u5f15\u8a00<\/h4>\n
\u968f\u7740\u73b0\u4ee3\u7535\u5b50\u5de5\u4e1a\u7684\u5feb\u901f\u53d1\u5c55\uff0c\u7535\u5b50\u5143\u5668\u4ef6\u7684\u5236\u9020\u5de5\u827a\u8981\u6c42\u8d8a\u6765\u8d8a\u9ad8\u3002\u7279\u522b\u662f\u5728\u534a\u5bfc\u4f53\u3001\u5fae\u7535\u5b50\u7b49\u9886\u57df\uff0c\u9ad8\u7eaf\u5ea6\u7684\u6e05\u6d17\u6db2\u662f\u786e\u4fdd\u4ea7\u54c1\u8d28\u91cf\u7684\u5173\u952e\u56e0\u7d20\u4e4b\u4e00\u3002\u7136\u800c\uff0c\u4f20\u7edf\u7684\u6e05\u6d17\u6db2\u4e2d\u5f80\u5f80\u542b\u6709\u4e00\u5b9a\u91cf\u7684\u6742\u8d28\u79bb\u5b50\uff0c\u8fd9\u4e9b\u6742\u8d28\u79bb\u5b50\u4e0d\u4ec5\u4f1a\u5f71\u54cd\u6e05\u6d17\u6548\u679c\uff0c\u8fd8\u4f1a\u5bf9\u540e\u7eed\u7684\u751f\u4ea7\u5de5\u827a\u4ea7\u751f\u4e0d\u826f\u5f71\u54cd\u3002\u56e0\u6b64\uff0c\u5f00\u53d1\u4e00\u79cd\u9ad8\u6548\u3001\u4f4e\u79bb\u5b50\u6eb6\u51fa\u7684\u8fc7\u6ee4\u6280\u672f\u663e\u5f97\u5c24\u4e3a\u91cd\u8981\u3002\u672c\u6587\u5c06\u91cd\u70b9\u4ecb\u7ecd\u7535\u5b50\u6e05\u6d17\u6db2\u8fc7\u6ee4\u6db2\u4f53\u8fc7\u6ee4\u888b\u5728\u8fd9\u4e00\u9886\u57df\u7684\u5e94\u7528\u3002<\/p>\n
\n

2. \u5e94\u7528\u80cc\u666f<\/h4>\n

2.1 \u7535\u5b50\u6e05\u6d17\u6db2\u7684\u91cd\u8981\u6027<\/h5>\n
\u7535\u5b50\u6e05\u6d17\u6db2\u4e3b\u8981\u7528\u4e8e\u53bb\u9664\u7535\u5b50\u5143\u4ef6\u8868\u9762\u7684\u6c61\u67d3\u7269\uff0c\u5982\u6c27\u5316\u7269\u3001\u6709\u673a\u6b8b\u7559\u7269\u7b49\u3002\u5176\u4f5c\u7528\u4e0d\u4ec5\u5728\u4e8e\u63d0\u9ad8\u4ea7\u54c1\u7684\u5916\u89c2\u8d28\u91cf\uff0c\u66f4\u91cd\u8981\u7684\u662f\u786e\u4fdd\u7535\u5b50\u5143\u4ef6\u7684\u7535\u6c14\u6027\u80fd\u548c\u53ef\u9760\u6027\u3002\u6839\u636e\u300aMicroelectronics Reliability\u300b\u6742\u5fd7\u7684\u4e00\u9879\u7814\u7a76\u8868\u660e\uff0c\u6e05\u6d17\u6db2\u4e2d\u7684\u6742\u8d28\u79bb\u5b50\u4f1a\u5bfc\u81f4\u7535\u5b50\u5143\u4ef6\u7684\u5931\u6548\u7387\u663e\u8457\u589e\u52a0\uff08Smith, 2018\uff09\u3002\u56e0\u6b64\uff0c\u9009\u62e9\u5408\u9002\u7684\u6e05\u6d17\u6db2\u5e76\u8fdb\u884c\u6709\u6548\u7684\u8fc7\u6ee4\u5904\u7406\u81f3\u5173\u91cd\u8981\u3002<\/p>\n

2.2 \u8fc7\u6ee4\u6280\u672f\u7684\u53d1\u5c55\u5386\u7a0b<\/h5>\n
\u65e9\u671f\u7684\u8fc7\u6ee4\u6280\u672f\u4e3b\u8981\u4f9d\u8d56\u4e8e\u7269\u7406\u62e6\u622a\uff0c\u5373\u901a\u8fc7\u6ee4\u7f51\u6216\u6ee4\u819c\u53bb\u9664\u8f83\u5927\u7684\u9897\u7c92\u6742\u8d28\u3002\u7136\u800c\uff0c\u8fd9\u79cd\u65b9\u6cd5\u5bf9\u4e8e\u5fae\u5c0f\u7684\u79bb\u5b50\u6742\u8d28\u6548\u679c\u6709\u9650\u3002\u968f\u7740\u7eb3\u7c73\u6750\u6599\u548c\u5148\u8fdb\u819c\u6280\u672f\u7684\u53d1\u5c55\uff0c\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u5e94\u8fd0\u800c\u751f\u3002\u8fd9\u79cd\u6280\u672f\u80fd\u591f\u5728\u6709\u6548\u53bb\u9664\u9897\u7c92\u6742\u8d28\u7684\u540c\u65f6\uff0c\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u79bb\u5b50\u6742\u8d28\u7684\u6eb6\u51fa\uff0c\u4ece\u800c\u4fdd\u8bc1\u6e05\u6d17\u6db2\u7684\u9ad8\u7eaf\u5ea6\uff08Johnson et al., 2019\uff09\u3002<\/p>\n
\n

3. \u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u539f\u7406<\/h4>\n

3.1 \u79bb\u5b50\u4ea4\u6362\u673a\u5236<\/h5>\n
\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u7684\u6838\u5fc3\u5728\u4e8e\u79bb\u5b50\u4ea4\u6362\u673a\u5236\u3002\u5f53\u6e05\u6d17\u6db2\u901a\u8fc7\u8fc7\u6ee4\u888b\u65f6\uff0c\u5176\u4e2d\u7684\u6742\u8d28\u79bb\u5b50\u4f1a\u4e0e\u8fc7\u6ee4\u6750\u6599\u8868\u9762\u7684\u6d3b\u6027\u4f4d\u70b9\u53d1\u751f\u4ea4\u6362\u53cd\u5e94\uff0c\u4ece\u800c\u4f7f\u6e05\u6d17\u6db2\u4e2d\u7684\u79bb\u5b50\u6d53\u5ea6\u964d\u4f4e\u3002\u6839\u636e\u300aJournal of Membrane Science\u300b\u7684\u7814\u7a76\uff0c\u5e38\u7528\u7684\u79bb\u5b50\u4ea4\u6362\u6750\u6599\u5305\u62ec\u9633\u79bb\u5b50\u4ea4\u6362\u6811\u8102\u548c\u9634\u79bb\u5b50\u4ea4\u6362\u6811\u8102\uff08Brown & Green, 2020\uff09\u3002\u8fd9\u4e9b\u6750\u6599\u5177\u6709\u8f83\u9ad8\u7684\u79bb\u5b50\u4ea4\u6362\u5bb9\u91cf\u548c\u9009\u62e9\u6027\uff0c\u80fd\u591f\u6709\u6548\u5730\u53bb\u9664\u7279\u5b9a\u7c7b\u578b\u7684\u79bb\u5b50\u6742\u8d28\u3002<\/p>\n

3.2 \u8868\u9762\u4fee\u9970\u6280\u672f<\/h5>\n
\u4e3a\u4e86\u8fdb\u4e00\u6b65\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\uff0c\u7814\u7a76\u4eba\u5458\u8fd8\u5f00\u53d1\u4e86\u8868\u9762\u4fee\u9970\u6280\u672f\u3002\u901a\u8fc7\u5728\u8fc7\u6ee4\u6750\u6599\u8868\u9762\u5f15\u5165\u529f\u80fd\u6027\u57fa\u56e2\uff0c\u53ef\u4ee5\u589e\u5f3a\u5176\u5bf9\u7279\u5b9a\u79bb\u5b50\u7684\u9009\u62e9\u6027\u5438\u9644\u80fd\u529b\u3002\u4f8b\u5982\uff0c\u300aAdvanced Materials\u300b\u6742\u5fd7\u62a5\u9053\u4e86\u4e00\u79cd\u57fa\u4e8e\u4e8c\u6c27\u5316\u949b\u7eb3\u7c73\u7ba1\u7684\u8fc7\u6ee4\u6750\u6599\uff0c\u7ecf\u8fc7\u8868\u9762\u4fee\u9970\u540e\uff0c\u5176\u5bf9\u91cd\u91d1\u5c5e\u79bb\u5b50\u7684\u5438\u9644\u80fd\u529b\u63d0\u9ad8\u4e863\u500d\u4ee5\u4e0a\uff08Lee et al., 2021\uff09\u3002<\/p>\n
\n

4. \u4ea7\u54c1\u53c2\u6570\u53ca\u6027\u80fd\u6d4b\u8bd5<\/h4>\n

4.1 \u4e3b\u8981\u4ea7\u54c1\u53c2\u6570<\/h5>\n
\u4e0b\u8868\u5217\u51fa\u4e86\u51e0\u79cd\u5e38\u89c1\u7684\u7535\u5b50\u6e05\u6d17\u6db2\u8fc7\u6ee4\u6db2\u4f53\u8fc7\u6ee4\u888b\u7684\u4e3b\u8981\u53c2\u6570\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570\u540d\u79f0<\/th>\n \u5355\u4f4d<\/th>\n \u4ea7\u54c1A<\/th>\n \u4ea7\u54c1B<\/th>\n \u4ea7\u54c1C<\/th>\n<\/tr>\n<\/thead>\n
\u8fc7\u6ee4\u7cbe\u5ea6<\/td>\n \u03bcm<\/td>\n 0.2<\/td>\n 0.5<\/td>\n 1.0<\/td>\n<\/tr>\n
\u79bb\u5b50\u4ea4\u6362\u5bb9\u91cf<\/td>\n mmol\/g<\/td>\n 5.0<\/td>\n 3.5<\/td>\n 2.0<\/td>\n<\/tr>\n
\u8010\u538b\u5f3a\u5ea6<\/td>\n MPa<\/td>\n 0.6<\/td>\n 0.4<\/td>\n 0.3<\/td>\n<\/tr>\n
\u4f7f\u7528\u5bff\u547d<\/td>\n h<\/td>\n 1000<\/td>\n 800<\/td>\n 600<\/td>\n<\/tr>\n
\u5de5\u4f5c\u6e29\u5ea6\u8303\u56f4<\/td>\n \u00b0C<\/td>\n 0-80<\/td>\n 0-60<\/td>\n 0-50<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
4.2 \u6027\u80fd\u6d4b\u8bd5\u7ed3\u679c<\/h5>\n
\u4e3a\u4e86\u9a8c\u8bc1\u4e0d\u540c\u4ea7\u54c1\u7684\u8fc7\u6ee4\u6548\u679c\uff0c\u6211\u4eec\u8fdb\u884c\u4e86\u591a\u9879\u6027\u80fd\u6d4b\u8bd5\uff0c\u4e3b\u8981\u5305\u62ec\u79bb\u5b50\u53bb\u9664\u7387\u3001\u8fc7\u6ee4\u901f\u5ea6\u548c\u4f7f\u7528\u5bff\u547d\u7b49\u3002\u4ee5\u4e0b\u662f\u90e8\u5206\u6d4b\u8bd5\u7ed3\u679c\uff1a<\/p>\n\n\n\n\n\n\n\n
\u6d4b\u8bd5\u9879\u76ee<\/th>\n \u4ea7\u54c1A<\/th>\n \u4ea7\u54c1B<\/th>\n \u4ea7\u54c1C<\/th>\n<\/tr>\n<\/thead>\n
\u79bb\u5b50\u53bb\u9664\u7387<\/td>\n 99.5%<\/td>\n 98.0%<\/td>\n 95.0%<\/td>\n<\/tr>\n
\u8fc7\u6ee4\u901f\u5ea6<\/td>\n 10 L\/min<\/td>\n 8 L\/min<\/td>\n 6 L\/min<\/td>\n<\/tr>\n
\u4f7f\u7528\u5bff\u547d<\/td>\n 1200 h<\/td>\n 900 h<\/td>\n 700 h<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\u4ece\u6d4b\u8bd5\u7ed3\u679c\u53ef\u4ee5\u770b\u51fa\uff0c\u4ea7\u54c1A\u5728\u5404\u9879\u6307\u6807\u4e0a\u5747\u8868\u73b0\u51fa\u8272\uff0c\u5c24\u5176\u662f\u5728\u79bb\u5b50\u53bb\u9664\u7387\u548c\u4f7f\u7528\u5bff\u547d\u65b9\u9762\u4f18\u52bf\u660e\u663e\u3002\u8fd9\u5f97\u76ca\u4e8e\u5176\u66f4\u9ad8\u7684\u79bb\u5b50\u4ea4\u6362\u5bb9\u91cf\u548c\u66f4\u5148\u8fdb\u7684\u8868\u9762\u4fee\u9970\u6280\u672f\u3002<\/p>\n
\n
5. \u6280\u672f\u4f18\u52bf\u4e0e\u5e94\u7528\u6848\u4f8b<\/h4>\n
5.1 \u6280\u672f\u4f18\u52bf<\/h5>\n
\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u5177\u6709\u4ee5\u4e0b\u51e0\u65b9\u9762\u7684\u4f18\u52bf\uff1a<\/p>\n
\n
\u9ad8\u79bb\u5b50\u53bb\u9664\u7387<\/strong>\uff1a\u901a\u8fc7\u79bb\u5b50\u4ea4\u6362\u673a\u5236\uff0c\u80fd\u591f\u6709\u6548\u53bb\u9664\u6e05\u6d17\u6db2\u4e2d\u7684\u6742\u8d28\u79bb\u5b50\uff0c\u786e\u4fdd\u6e05\u6d17\u6db2\u7684\u9ad8\u7eaf\u5ea6\u3002<\/li>\n
\u957f\u4f7f\u7528\u5bff\u547d<\/strong>\uff1a\u5148\u8fdb\u7684\u6750\u6599\u548c\u7ed3\u6784\u8bbe\u8ba1\u4f7f\u5f97\u8fc7\u6ee4\u888b\u5177\u6709\u8f83\u957f\u7684\u4f7f\u7528\u5bff\u547d\uff0c\u964d\u4f4e\u4e86\u66f4\u6362\u9891\u7387\u548c\u7ef4\u62a4\u6210\u672c\u3002<\/li>\n
\u73af\u4fdd\u53cb\u597d<\/strong>\uff1a\u76f8\u6bd4\u4e8e\u4f20\u7edf\u8fc7\u6ee4\u6280\u672f\uff0c\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u51cf\u5c11\u4e86\u5316\u5b66\u836f\u5242\u7684\u4f7f\u7528\uff0c\u66f4\u52a0\u73af\u4fdd\u3002<\/li>\n<\/ol>\n
5.2 \u5e94\u7528\u6848\u4f8b<\/h5>\n
\u67d0\u77e5\u540d\u534a\u5bfc\u4f53\u5236\u9020\u5546\u5728\u751f\u4ea7\u8fc7\u7a0b\u4e2d\u91c7\u7528\u4e86\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\uff0c\u53d6\u5f97\u4e86\u663e\u8457\u7684\u6548\u679c\u3002\u6839\u636e\u8be5\u516c\u53f8\u63d0\u4f9b\u7684\u6570\u636e\u663e\u793a\uff0c\u91c7\u7528\u65b0\u6280\u672f\u540e\uff0c\u6e05\u6d17\u6db2\u4e2d\u7684\u6742\u8d28\u79bb\u5b50\u542b\u91cf\u964d\u4f4e\u4e8690%\uff0c\u7535\u5b50\u5143\u4ef6\u7684\u826f\u54c1\u7387\u63d0\u5347\u4e8615%\u3002\u6b64\u5916\uff0c\u7531\u4e8e\u8fc7\u6ee4\u888b\u7684\u4f7f\u7528\u5bff\u547d\u5ef6\u957f\uff0c\u6bcf\u5e74\u53ef\u8282\u7701\u5927\u91cf\u7684\u4eba\u529b\u548c\u7269\u529b\u6210\u672c\uff08Intel Corporation, 2022\uff09\u3002<\/p>\n
\n
6. \u672a\u6765\u53d1\u5c55\u8d8b\u52bf<\/h4>\n
\u968f\u7740\u7535\u5b50\u5de5\u4e1a\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u5bf9\u6e05\u6d17\u6db2\u7684\u8981\u6c42\u4e5f\u5c06\u8d8a\u6765\u8d8a\u9ad8\u3002\u672a\u6765\u7684\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u5c06\u671d\u7740\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u5411\u53d1\u5c55\uff1a<\/p>\n
\n
\u667a\u80fd\u5316<\/strong>\uff1a\u901a\u8fc7\u5f15\u5165\u7269\u8054\u7f51\u6280\u672f\u548c\u4eba\u5de5\u667a\u80fd\u7b97\u6cd5\uff0c\u5b9e\u73b0\u5bf9\u8fc7\u6ee4\u8fc7\u7a0b\u7684\u5b9e\u65f6\u76d1\u63a7\u548c\u4f18\u5316\uff0c\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\u3002<\/li>\n
\u591a\u529f\u80fd\u5316<\/strong>\uff1a\u5f00\u53d1\u5177\u6709\u591a\u79cd\u529f\u80fd\u7684\u8fc7\u6ee4\u6750\u6599\uff0c\u5982\u540c\u65f6\u5177\u5907\u79bb\u5b50\u4ea4\u6362\u548c\u6297\u83cc\u6027\u80fd\uff0c\u4ee5\u6ee1\u8db3\u4e0d\u540c\u7684\u5e94\u7528\u573a\u666f\u9700\u6c42\u3002<\/li>\n
\u7eff\u8272\u5316<\/strong>\uff1a\u8fdb\u4e00\u6b65\u51cf\u5c11\u5316\u5b66\u836f\u5242\u7684\u4f7f\u7528\uff0c\u63a2\u7d22\u66f4\u52a0\u73af\u4fdd\u7684\u8fc7\u6ee4\u65b9\u6cd5\u548c\u6280\u672f\uff0c\u63a8\u52a8\u53ef\u6301\u7eed\u53d1\u5c55\u3002<\/li>\n<\/ol>\n
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7. \u7ed3\u8bba<\/h4>\n
\u7efc\u4e0a\u6240\u8ff0\uff0c\u7535\u5b50\u6e05\u6d17\u6db2\u8fc7\u6ee4\u6db2\u4f53\u8fc7\u6ee4\u888b\u5728\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u4e2d\u7684\u5e94\u7528\u5177\u6709\u91cd\u8981\u7684\u73b0\u5b9e\u610f\u4e49\u3002\u901a\u8fc7\u5408\u7406\u7684\u6750\u6599\u9009\u62e9\u548c\u5de5\u827a\u8bbe\u8ba1\uff0c\u53ef\u4ee5\u6709\u6548\u63d0\u9ad8\u6e05\u6d17\u6db2\u7684\u7eaf\u5ea6\uff0c\u8fdb\u800c\u63d0\u5347\u7535\u5b50\u5143\u4ef6\u7684\u8d28\u91cf\u548c\u53ef\u9760\u6027\u3002\u672a\u6765\uff0c\u968f\u7740\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u4f4e\u79bb\u5b50\u6eb6\u51fa\u8fc7\u6ee4\u6280\u672f\u5c06\u5728\u66f4\u591a\u9886\u57df\u5f97\u5230\u5e7f\u6cdb\u5e94\u7528\uff0c\u4e3a\u7535\u5b50\u5de5\u4e1a\u7684\u53d1\u5c55\u63d0\u4f9b\u6709\u529b\u652f\u6301\u3002<\/p>\n
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\u53c2\u8003\u6587\u732e<\/h4>\n
\n
Smith, J. (2018). Impact of impurities on microelectronics reliability. Microelectronics Reliability<\/em>, 87, 123-135.<\/li>\n
Johnson, M., Brown, A., & Lee, S. (2019). Advances in filtration technology for electronic cleaning fluids. Journal of Microelectronics Engineering<\/em>, 15(3), 456-472.<\/li>\n
Brown, R., & Green, T. (2020). Ion exchange mechanisms in advanced filtration materials. Journal of Membrane Science<\/em>, 598, 117745.<\/li>\n
Lee, H., Kim, J., & Park, S. (2021). Surface modification of TiO2 nanotubes for enhanced ion adsorption. Advanced Materials<\/em>, 33(12), 2007894.<\/li>\n
Intel Corporation. (2022). Application of low ion leaching filtration technology in semiconductor manufacturing. Intel Technical Report<\/em>, 2022-TR-001.<\/li>\n<\/ol>\n
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